Chuck Heaters / Wafer Heating Foils

Heat is a critical factor in the manufacturing of semiconductors. Beside the temperature distribution tolerance of the vacuum chuck or electrostatic chuck the low dependency of the electrical resistance on temperature is the crucial factor, which will determine wafer quality and productivity in the fabrication process.

These wafers must be specially configured with the right selection of the base material in order to optimally meet the desired thermal and electrical requirements.

ANDUS provides flexible circuit boards as project-based comprehensive solutions for chuck heaters and foil heaters with the widest range of dimensions, performance capabilities, and control options.

e turn your ideas into reality! 

Chuck Heater  Chuck Heater Chuck Heater
Chuck heater for vacuum
or electrostatic chucks
Wafer chuck in a manufacturing plant in the semiconductor industry Heating foil for the
packaging industry